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Nanolithography
Definition:
Writing on the nanoscale.
From the Greek
nanos
- Dwarf,
Lithos
- rock, and
grapho
- to write, this word literally means "very small writing on rocks."
Related NanoWords
Top-Down
Lithography
Semiconductor
Photolithography
References
Electrons: from Microscopy to Lithography
Frontiers in Optical Lithography
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Author:
Steve Lenhert
About the Author
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