Photolithography

Carving through use of light. Often, a photosensitive surface (a photoresist) is selectively exposed to light using a template. The exposed areas are subsequently etched (carved by chemical means).

Related Words Nanolithography Photolithographic Mask Far-Field Diffraction Limit Optical Tunneling

Used in Context Semiconductor Fabrication Frontiers in Optical Lithography Templating Quantum Interferometric Lithography