Nanolithography

Writing on the nanoscale. From the Greek words Nanos - Dwarf, Lithos - rock, and grapho - to write, this word literally means "small writing on rocks."

Related Words

Electron Beam
Lithography (EBL)

Photolithography

Scanning Probe
Microscopy

MEMS

Top-Down

Semiconductor

Used in Context

Electrons: from
Microscopy to Lithography

Frontiers in
Optical Lithography

Dip Pen
Nanolithography (DPN)

Nanolithography Links

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