Micro-Electromechanical Systems (MEMS)

Micro-Electromechanical Systems (MEMS, also known simply as microsystems - MST) combine electronics with microscale mechanical devices, resulting in microscopic machinery. Nano-Electromechanical Systems (NEMS) are orders of magnitude smaller and are one of the goals of nanotechnology.

Related Words

Nanomachine

Top-Down

Nanolithography

Used in Context

Nanomachines

MEMS & NEMS

MEMS Netlinks

Glossary Index