Photolithography
Definition: Writing or creating patterns by means of light.
Related NanoWords
• Nanolithography
• Photolithographic Mask
• Far-Field Diffraction Limit
• Optical Tunneling  

Used in Context
•  Semiconductor Fabrication
•  Frontiers in Optical Lithography
•  Templating  

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Typically, a photosensitive surface (a photoresist) is selectively exposed to light using a template. The exposed areas are subsequently etched (carved by chemical means). "Photolithography - The technique used to produce the silicon chips that make up modern-day computers (actually, the term predates printed circuits, although that is the form we are interested in). The traditional process involves shining light through a mask onto a photosensitive polymer (photoresist) on a silicon surface, then subsequently removing the exposed areas."
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