Nanolithography
Definition:
Writing on the nanoscale.
Related NanoWords
MEMS
Top-Down
Lithography
Semiconductor
Photolithography
Electron Beam Lithography
Scanning Probe Microscopy
Used in Context
Electrons: from
Microscopy to Lithography
Frontiers in
Optical Lithography
Encyclopedia Index
Article Archives
From the Greek
nanos
- Dwarf,
Lithos
- rock, and
grapho
- to write, this word literally means "small writing on rocks."
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Steve Lenhert
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