Nanolithography
Definition: Writing on the nanoscale.
Related NanoWords
• MEMS
• Top-Down
• Lithography
• Semiconductor
• Photolithography
• Electron Beam Lithography
• Scanning Probe Microscopy  

Used in Context
•  Electrons: from
Microscopy to Lithography

•  Frontiers in
Optical Lithography
 

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From the Greek nanos - Dwarf, Lithos - rock, and grapho - to write, this word literally means "small writing on rocks."

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