Electron Beam
Definition: A stream of electrons moving in the same direction at the same speed.
Related NanoWords
• Vacuum
• Top-Down
• Nanolithography
• Electron Beam Lithography
• Scanning Electron Microscopy  

Used in Context
•  Electrons: from Microscopy to Lithography  

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Such a beam can be produced by accelerating and focusing electrons between a cathode and anode separated by a vacuum (i.e. an electron gun). Perhaps the most abundantly manufactured electron beams are those produced in cathode ray tubes within some television sets. Electron Beams are used in Scanning Electron Microscopy (SEM) and Electron Beam Lithography (EBL).

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